Atomic Resolution Secondary Electron Imaging with Aberration Corrected Scanning Transmission Electron Microscope
نویسندگان
چکیده
منابع مشابه
Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope.
The depth resolution for optical sectioning in the scanning transmission electron microscope is measured using the results of optical sectioning experiments of laterally extended objects. We show that the depth resolution depends on the numerical aperture of the objective lens as expected. We also find, however, that the depth resolution depends on the lateral extent of the object that is being...
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The new possibilities of aberration-corrected scanning transmission electron microscopy (STEM) extend far beyond the factor of 2 or more in lateral resolution that was the original motivation. The smaller probe also gives enhanced single atom sensitivity, both for imaging and for spectroscopy, enabling light elements to be detected in a Z-contrast image and giving much improved phase contrast i...
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The use of spherical aberration correctors in the scanning transmission electron microscope (STEM) has the effect of reducing the depth of field of the microscope, making three-dimensional imaging of a specimen possible by optical sectioning. Depth resolution can be improved further by placing aberration correctors and lenses pre and post specimen to achieve an imaging mode known as scanning co...
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An all-magnetic monochromator/spectrometer system for sub-30 meV energy-resolution electron energy-loss spectroscopy in the scanning transmission electron microscope is described. It will link the energy being selected by the monochromator to the energy being analysed by the spectrometer, without resorting to decelerating the electron beam. This will allow it to attain spectral energy stability...
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Advances in nanotechnology and electronic device miniaturization are making atomic-level control of structure and composition increasingly important. To promote research and development in this field, it is essential to develop technology for measuring the structures, compositions, and properties of materials and devices with atomic resolution. Scanning transmission electron microscopy (STEM), ...
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 2013
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.34.247